著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Sheng-Shian Li and Yu-Wei Lin and Yuan Xie and Zeying Ren and C.T.-C. Nguyen,"Micromechanical ""hollow-disk"" ring resonators",17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest,,IEEE,,,,821-824,https://cir.nii.ac.jp/crid/1360574094730350848,https://doi.org/10.1109/mems.2004.1290711