著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
D. S. Pickard and C. Kenney and S. Tanimoto and T. Crane and T. Groves and R. F. W. Pease,Monolithic multichannel secondary electron detector for distributed axis electron beam lithography and inspection,"Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena",1071-1023,American Vacuum Society,2007-11-01,25,6,2277-2283,https://cir.nii.ac.jp/crid/1360574095179588480,https://doi.org/10.1116/1.2804611