Development of Inspection Machine that Detect Small Particles Added on Surface with Precise Pattern by Capturing Backwards Scattered Polarized Light
説明
<jats:p>The paper discusses the development of inspectionmachine to detect small particle by capturing backwards scattered polarized light. The proposed optical system consists of very low angle (2°) horizontal line laser light with<jats:italic>S</jats:italic>polarized characteristics and angle 150° backwards line CCD Camera to capture<jats:italic>P</jats:italic>polarized light from particles on wafer or glass and so on. This system is confirmed to apply the real production of wafer or glass.</jats:p>
収録刊行物
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- International Journal of Automation Technology
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International Journal of Automation Technology 6 (6), 781-791, 2012-11-05
Fuji Technology Press Ltd.