著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
M. G. Dowsett and G. A. Cooke,Two dimensional profiling using secondary ion mass spectrometry,"Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena",1071-1023,American Vacuum Society,1992-01-01,10,1,353-357,https://cir.nii.ac.jp/crid/1360574095977799808,https://doi.org/10.1116/1.586358