著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
S. Matsui and Y. Igaku and H. Ishigaki and J. Fujita and M. Ishida and Y. Ochiai and M. Komuro and H. Hiroshima,Room temperature replication in spin on glass by nanoimprint technology,"Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena",1071-1023,American Vacuum Society,2001-11-01,19,6,2801-2805,https://cir.nii.ac.jp/crid/1360574096429817216,https://doi.org/10.1116/1.1417547