著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Hidetaka Asoh and Daichi Sekido and Hideki Hashimoto,Potential of micrometer-sized graphite as a catalyst for chemical etching of silicon,Materials Science in Semiconductor Processing,1369-8001,Elsevier BV,2021-01,121,,105327,https://cir.nii.ac.jp/crid/1360576121820389504,https://doi.org/10.1016/j.mssp.2020.105327