Implantation Gettering of Gold in Silicon

DOI Web Site Web Site 5 Citations
  • P. F. Ordung
    Department of Electrical and Computer Engineering, University of California, Santa Barbara, California 93106
  • M. J. T. Lo
    Department of Electrical and Computer Engineering, University of California, Santa Barbara, California 93106
  • J. G. Skalnik
    Department of Electrical and Computer Engineering, University of California, Santa Barbara, California 93106

Bibliographic Information

Published
1981-07-01
Rights Information
  • https://iopscience.iop.org/page/copyright
  • https://iopscience.iop.org/info/page/text-and-data-mining
DOI
  • 10.1149/1.2127684
Publisher
The Electrochemical Society

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