Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
M. Isaacson and A. Muray,<i>I</i> <i>n</i> <i>s</i> <i>i</i> <i>t</i> <i>u</i> vaporization of very low molecular weight resists using 1/2 nm diameter electron beams,Journal of Vacuum Science and Technology,0022-5355,American Vacuum Society,1981-11-01,19,4,1117-1120,https://cir.nii.ac.jp/crid/1360579816420398464,https://doi.org/10.1116/1.571180