Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) T. Hamasaki and T. Inoue and I. Higashinakagawa and T. Yoshii and M. Kashiwagi and H. Tango,Amplitude Modulated Pseudo-Line Electron Beam Recrystallization for Large Area SOI Growth,Extended Abstracts of the1985 Conference on Solid State Devices and Materials,,The Japan Society of Applied Physics,1985,,,,https://cir.nii.ac.jp/crid/1360579816884515072,https://doi.org/10.7567/ssdm.1985.a-2-2