著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
N. Marchack and L. Buzi and D. B. Farmer and H. Miyazoe and J. M. Papalia and H. Yan and G. Totir and S. U. Engelmann,Plasma processing for advanced microelectronics beyond CMOS,Journal of Applied Physics,0021-8979,AIP Publishing,2021-08-24,130,8,,https://cir.nii.ac.jp/crid/1360579820046007168,https://doi.org/10.1063/5.0053666