Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) Katherine Smyth and Sang-Gook Kim,Experiment and simulation validated analytical equivalent circuit model for piezoelectric micromachined ultrasonic transducers,"IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control",0885-3010,Institute of Electrical and Electronics Engineers (IEEE),2015-04,62,4,744-765,https://cir.nii.ac.jp/crid/1360580239711708288,https://doi.org/10.1109/tuffc.2014.006725