著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Rui M.R. Pinto and Ved Gund and Carlos Calaza and K.K. Nagaraja and K.B. Vinayakumar,Piezoelectric aluminum nitride thin-films: A review of wet and dry etching techniques,Microelectronic Engineering,0167-9317,Elsevier BV,2022-03,257,,111753,https://cir.nii.ac.jp/crid/1360580933353641216,https://doi.org/10.1016/j.mee.2022.111753