著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Takeru Niinuma and Tsukasa Sugiura and Masaki Kume and Yuto Nakayama and Hiroki Morita and Atsushi Sunahara and Shinichi Namba and Takeshi Higashiguchi,Evaluation of suprathermal ions in a laser-produced plasma beyond-EUV source,Photomask Japan 2023: XXIX Symposium on Photomask and Next-Generation Lithography Mask Technology,,SPIE,2023-09-29,,,27,https://cir.nii.ac.jp/crid/1360584340723308160,https://doi.org/10.1117/12.2687366