著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Yan Zhang and Takuya Takeuchi and Kenji Ishikawa and Toshio Hayashi and Keigo Takeda and Makoto Sekine and Masaru Hori,Dependence of absolute photon flux on infrared absorbance alteration and surface roughness on photoresist polymers irradiated with vacuum ultraviolet photons emitted from HBr plasma,Japanese Journal of Applied Physics,0021-4922,IOP Publishing,2017-11-15,56,12,126503,https://cir.nii.ac.jp/crid/1360847874821505920,https://doi.org/10.7567/jjap.56.126503