著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Mikko Ritala and Markku Leskelä and Eero Rauhala and Pekka Haussalo,Atomic Layer Epitaxy Growth of TiN Thin Films,Journal of The Electrochemical Society,0013-4651,The Electrochemical Society,1995-08-01,142,8,2731-2737,https://cir.nii.ac.jp/crid/1360855569038102400,https://doi.org/10.1149/1.2050083