著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Nassir Mojarad and Daniel Fan and Jens Gobrecht and Yasin Ekinci,Broadband interference lithography at extreme ultraviolet and soft x-ray wavelengths,Optics Letters,0146-9592,Optica Publishing Group,2014-04-08,39,8,2286,https://cir.nii.ac.jp/crid/1360855570288009088,https://doi.org/10.1364/ol.39.002286