著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
A Q Liu and M Tang and A Agarwal and A Alphones,Low-loss lateral micromachined switches for high frequency applications,Journal of Micromechanics and Microengineering,0960-1317,IOP Publishing,2004-10-26,15,1,157-167,https://cir.nii.ac.jp/crid/1360855570988458368,https://doi.org/10.1088/0960-1317/15/1/023