著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Mikko Nisula and Yohei Shindo and Hideyuki Koga and Maarit Karppinen,Atomic Layer Deposition of Lithium Phosphorus Oxynitride,Chemistry of Materials,0897-4756,American Chemical Society (ACS),2015-10-07,27,20,6987-6993,https://cir.nii.ac.jp/crid/1360855571146184960,https://doi.org/10.1021/acs.chemmater.5b02199