著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
L Lallement and A Rhallabi and C Cardinaud and M C Peignon-Fernandez and L L Alves,Global model and diagnostic of a low-pressure SF<sub>6</sub>/Ar inductively coupled plasma,Plasma Sources Science and Technology,0963-0252,IOP Publishing,2009-02-23,18,2,025001,https://cir.nii.ac.jp/crid/1360857597255336704,https://doi.org/10.1088/0963-0252/18/2/025001