著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
A.W. Tucker and M. Birnbaum,Laser chemical etching of vias in GaAs,IEEE Electron Device Letters,0741-3106,Institute of Electrical and Electronics Engineers (IEEE),1983-02,4,2,39-41,https://cir.nii.ac.jp/crid/1360861290710379008,https://doi.org/10.1109/edl.1983.25639