著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Akiko Hirata and Masanaga Fukasawa and Jomar Unico Tercero and Katsuhisa Kugimiya and Yoshiya Hagimoto and Kazuhiro Karahashi and Satoshi Hamaguchi and Hayato Iwamoto,High-throughput SiN ALE: surface reaction and ion-induced damage generation mechanisms,Japanese Journal of Applied Physics,0021-4922,IOP Publishing,2023-06-08,62,SI,SI1015,https://cir.nii.ac.jp/crid/1360861707163076992,https://doi.org/10.35848/1347-4065/accde6