著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Zhiying Chen and Joel Blakeney and Megan Carruth and Peter L. G. Ventzek and Alok Ranjan,Time-resolved ion energy distribution in pulsed inductively coupled argon plasma with/without DC bias,Journal of Vacuum Science & Technology B,2166-2746,American Vacuum Society,2022-04-11,40,3,,https://cir.nii.ac.jp/crid/1360861711783419008,https://doi.org/10.1116/6.0001737