著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Yanjun Han and Song Xue and Tong Wu and Zhen Wu and Wenping Guo and Yi Luo and Zhibiao Hao and Changzheng Sun,Nonselective and smooth etching of GaN/AlGaN heterostructures by Cl2/Ar/BCl3 inductively coupled plasmas,"Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films",0734-2101,American Vacuum Society,2004-02-20,22,2,407-412,https://cir.nii.ac.jp/crid/1360861712219622272,https://doi.org/10.1116/1.1641054