Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
David Herisson and DaniEle Neira and Cyril Fernand and Philippe Thony and Daniel Henry and Stephanie Kremer and Marco Polli and Marco Guevremont and Assim Elazami,Spectroscopic ellipsometry for lithography front-end level CD control: a complete analysis for production integration,SPIE Proceedings,0277-786X,SPIE,2003-05-27,5038,,264,https://cir.nii.ac.jp/crid/1360866922521745152,https://doi.org/10.1117/12.485031