著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Hideshi Miyajima and Kenji Ishikawa and Makoto Sekine and Masaru Hori,Review of methods for the mitigation of plasma‐induced damage to low‐dielectric‐constant interlayer dielectrics used for semiconductor logic device interconnects,Plasma Processes and Polymers,1612-8850,Wiley,2019-06-27,16,9,,https://cir.nii.ac.jp/crid/1361131414748954880,https://doi.org/10.1002/ppap.201900039