著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Tomoyuki Kikuchi and Yasuhiro Hasegawa and Hajime Shirai,Rf microplasma jet at atmospheric pressure: characterization and application to thin film processing,Journal of Physics D: Applied Physics,0022-3727,IOP Publishing,2004-05-13,37,11,1537-1543,https://cir.nii.ac.jp/crid/1361137043488095488,https://doi.org/10.1088/0022-3727/37/11/005