著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Keren J. Kanarik and Thorsten Lill and Eric A. Hudson and Saravanapriyan Sriraman and Samantha Tan and Jeffrey Marks and Vahid Vahedi and Richard A. Gottscho,Overview of atomic layer etching in the semiconductor industry,"Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films",0734-2101,American Vacuum Society,2015-03-01,33,2,020802,https://cir.nii.ac.jp/crid/1361137044112980992,https://doi.org/10.1116/1.4913379