著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Kurt E. Petersen,Silicon Torsional Scanning Mirror,IBM Journal of Research and Development,0018-8646,IBM,1980-09,24,5,631-637,https://cir.nii.ac.jp/crid/1361137044285472384,https://doi.org/10.1147/rd.245.0631