著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Masako Tanaka,An industrial and applied review of new MEMS devices features,Microelectronic Engineering,0167-9317,Elsevier BV,2007-05,84,5-8,1341-1344,https://cir.nii.ac.jp/crid/1361137044294987136,https://doi.org/10.1016/j.mee.2007.01.232