著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
A. von Keudell and W. Möller,A combined plasma-surface model for the deposition of C:H films from a methane plasma,Journal of Applied Physics,0021-8979,AIP Publishing,1994-06-15,75,12,7718-7727,https://cir.nii.ac.jp/crid/1361137045062905600,https://doi.org/10.1063/1.356603