著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
D. Zhuang and J.H. Edgar and Lianghong Liu and B. Liu and L. Walker,Wet Chemical Etching of AlN Single Crystals,MRS Internet Journal of Nitride Semiconductor Research,1092-5783,Springer Science and Business Media LLC,2002,7,,4,https://cir.nii.ac.jp/crid/1361137045144633344,https://doi.org/10.1557/s1092578300000302