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We report the dependence of the probe diameter and probe current on the lens acceptance half-angle. The results range between probe diameters of 1000 and 5000 Å at currents of 0.12–3.0 nA for half-angles of 1.2–6 mrad. The current density and brightness at the target for the 1000-Å-diam 57-kV probe were 1.5 A/cm2 and 3.3×106 A/cm2 sr, respectively. Astigmatic probes were also produced with dimensions smaller than 1000 Å.</jats:p>"}]}],"creator":[{"@id":"https://cir.nii.ac.jp/crid/1381137045587416321","@type":"Researcher","foaf:name":[{"@value":"R. L. Seliger"}],"jpcoar:affiliationName":[{"@value":"Hughes Research Laboratories, Malibu, California 90265"}]},{"@id":"https://cir.nii.ac.jp/crid/1381137045587416193","@type":"Researcher","foaf:name":[{"@value":"J. W. Ward"}],"jpcoar:affiliationName":[{"@value":"Hughes Research Laboratories, Malibu, California 90265"}]},{"@id":"https://cir.nii.ac.jp/crid/1381137045587416192","@type":"Researcher","foaf:name":[{"@value":"V. 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