著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Vladimir Volynets and Hansoo Shin and Dongwoo Kang and Dougyong Sung,Experimental study of plasma non-uniformities and the effect of phase-shift control in a very high frequency capacitive discharge,Journal of Physics D: Applied Physics,0022-3727,IOP Publishing,2010-02-12,43,8,085203,https://cir.nii.ac.jp/crid/1361137045643398528,https://doi.org/10.1088/0022-3727/43/8/085203