著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Lung-Tai Chen and Chia-Yen Lee and Wood-Hi Cheng,MEMS-based humidity sensor with integrated temperature compensation mechanism,Sensors and Actuators A: Physical,0924-4247,Elsevier BV,2008-10,147,2,522-528,https://cir.nii.ac.jp/crid/1361418520727390592,https://doi.org/10.1016/j.sna.2008.06.033