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Oxidation of Si surface by a pulsed Nd : YAG laser
Bibliographic Information
- Published
- 2004-05-13
- DOI
-
- 10.1088/0022-3727/37/11/011
- Publisher
- IOP Publishing
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Journal
-
- Journal of Physics D: Applied Physics
-
Journal of Physics D: Applied Physics 37 (11), 1569-1575, 2004-05-13
IOP Publishing
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Details 詳細情報について
-
- CRID
- 1361418521464028672
-
- ISSN
- 13616463
- 00223727
-
- Data Source
-
- Crossref
