著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI) Michael A. Lieberman and Allan J. Lichtenberg,Principles of Plasma Discharges and Materials Processing,"John Wiley & Sons Inc, Hoboken",,Wiley,2005-01-27,30,,399,https://cir.nii.ac.jp/crid/1361699993469112960,https://doi.org/10.1002/0471724254