著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Christoph Böhm,Electric force microscopy: Gigahertz and nanometer measurement tool,Microelectronic Engineering,0167-9317,Elsevier BV,1996-02,31,1-4,171-179,https://cir.nii.ac.jp/crid/1361699993527607552,https://doi.org/10.1016/0167-9317(95)00340-1