著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI) Yoshiyuki Sato and Masaki Watanabe and Kazuo Imai,Characterization of Phosphorus Pile‐Up at the SiO2 / Si Interface,Journal of The Electrochemical Society,0013-4651,The Electrochemical Society,1993-09-01,140,9,2679-2682,https://cir.nii.ac.jp/crid/1361699994777171584,https://doi.org/10.1149/1.2220885