著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI) Muthu B.J. Wijesundara and Robert Azevedo,Silicon Carbide Microsystems for Harsh Environments,MEMS Reference Shelf,1936-4407,Springer New York,2011,,,15,https://cir.nii.ac.jp/crid/1361699994807730688,https://doi.org/10.1007/978-1-4419-7121-0