Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
F. Engelmark and G. F. Iriarte and I. V. Katardjiev and M. Ottosson and P. Muralt and S. Berg,Structural and electroacoustic studies of AlN thin films during low temperature radio frequency sputter deposition,"Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films",0734-2101,American Vacuum Society,2001-09-01,19,5,2664-2669,https://cir.nii.ac.jp/crid/1361981468406864384,https://doi.org/10.1116/1.1399320