著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Keith Guinn and K. Tokashiki and S. C. McNevin and M. Cerullo,Optical emission diagnostics for contact etching in Applied Materials Centura HDP 5300 etcher,"Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films",0734-2101,American Vacuum Society,1996-05-01,14,3,1137-1141,https://cir.nii.ac.jp/crid/1361981470515774592,https://doi.org/10.1116/1.580283