著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
W. Jungling and P. Pichler and S. Selberherr and E. Guerrero and H.W. Potzl,Simulation of critical IC fabrication processes using advanced physical and numerical methods,IEEE Transactions on Electron Devices,0018-9383,Institute of Electrical and Electronics Engineers (IEEE),1985-02,32,2,156-167,https://cir.nii.ac.jp/crid/1361981470988676352,https://doi.org/10.1109/t-ed.1985.21925