Slot antenna‐coupled thin‐film warm carrier far‐infrared radiation detectors

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<jats:title>Abstract</jats:title><jats:p>Slot antenna‐coupled thin‐film warm carrier devices were fabricated, and the detection properties were investigated at 94 and 700 GHz. Two‐dimensional 8 × 3 slot antenna arrays fed by a coplanar waveguide were used as the antennas. The thin‐film antennas were fabricated with a photolithographic method, and the warm carrier detectors, which have a contact area of 8 × 10<jats:sup>−10</jats:sup>cm<jats:sup>2</jats:sup>, were fabricated with an electron beam lithographic method. The experimental results indicate that the fabricated devices receive the far‐infrared radiation with antenna and rectified it with nonlinear <jats:italic>I–V</jats:italic> characteristic. By changing the antenna from the single‐slot antenna to the two‐dimensional 8 × 3 slot antenna array, the detected sensitivity improved by 11 dB. © 2005 Wiley Periodicals, Inc. Electr Eng Jpn, 151(4): 1–6, 2005; Published online in Wiley InterScience (<jats:ext-link xmlns:xlink="http://www.w3.org/1999/xlink" xlink:href="http://www.interscience.wiley.com">www.interscience.wiley.com</jats:ext-link>). DOI 10.1002/eej.20083</jats:p>

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