著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
A J Flikweert and T Zimmermann and T Merdzhanova and D Weigand and W Appenzeller and A Gordijn,Microcrystalline thin-film solar cell deposition on moving substrates using a linear VHF-PECVD reactor and a cross-flow geometry,Journal of Physics D: Applied Physics,0022-3727,IOP Publishing,2011-12-12,45,1,015101,https://cir.nii.ac.jp/crid/1362262943374820736,https://doi.org/10.1088/0022-3727/45/1/015101