著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Markos Trikeriotis and Woo Jin Bae and Evan Schwartz and Marie Krysak and Neal Lafferty and Peng Xie and Bruce Smith and Paul A. Zimmerman and Christopher K. Ober and Emmanuel P. Giannelis,"Development of an inorganic photoresist for DUV, EUV, and electron beam imaging",SPIE Proceedings,0277-786X,SPIE,2010-03-11,7639,,76390E,https://cir.nii.ac.jp/crid/1362262943822071296,https://doi.org/10.1117/12.846672