著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
T. Sharda and T. Soga and T. Jimbo and M. Umeno,Growth of nanocrystalline diamond films by biased enhanced microwave plasma chemical vapor deposition,Diamond and Related Materials,0925-9635,Elsevier BV,2001-09,10,9-10,1592-1596,https://cir.nii.ac.jp/crid/1362262944526137472,https://doi.org/10.1016/s0925-9635(01)00415-0