著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Liping Bai and Naiqi Wu and Zhiwu Li and MengChu Zhou,Optimal One-Wafer Cyclic Scheduling and Buffer Space Configuration for Single-Arm Multicluster Tools With Linear Topology,"IEEE Transactions on Systems, Man, and Cybernetics: Systems",2168-2216,Institute of Electrical and Electronics Engineers (IEEE),2016-10,46,10,1456-1467,https://cir.nii.ac.jp/crid/1362262944693492736,https://doi.org/10.1109/tsmc.2015.2501232