著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Abid Iqbal and Faisal Mohd-Yasin,Reactive Sputtering of Aluminum Nitride (002) Thin Films for Piezoelectric Applications: A Review,Sensors,1424-8220,MDPI AG,2018-06-02,18,6,1797,https://cir.nii.ac.jp/crid/1362262944778384640,https://doi.org/10.3390/s18061797