Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
I. A. Blech and D. B. Fraser and S. E. Haszko,Optimization of Al step coverage through computer simulation and scanning electron microscopy,Journal of Vacuum Science and Technology,0022-5355,American Vacuum Society,1978-01-01,15,1,13-19,https://cir.nii.ac.jp/crid/1362262945449063296,https://doi.org/10.1116/1.569428