著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Hideaki Tsubaki and Wataru Nihashi and Toru Tsuchihashi and Kei Yamamoto and Takahiro Goto,Negative-tone imaging with EUV exposure toward 13nm hp,Extreme Ultraviolet (EUV) Lithography VII,0277-786X,SPIE,2016-03-18,9776,,977608,https://cir.nii.ac.jp/crid/1362262946322176640,https://doi.org/10.1117/12.2218761